| VITO PLASMA | |
| TREATMENT GAS | Nitrogen, air, oxygen, carbon dioxide, hydrogen, helium,
argon,… and any mixtures thereof
|
|
CHEMICAL PRECURSOR (LIQUID OR VAPOUR) |
No limitations: even dispersions of liquids with solid
particles can be introduced
|
| FREQUENCY | Power independent
Adjustable from 1 – 100 kHz |
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